Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10118053 | Apparatus, method, and program for movable part tracking and treatment | Koki Yanagawa, Kazunao Maeda, Keiko Okaya | 2018-11-06 |
| 9935020 | Method of evaluating metal contamination in boron-doped P-type silicon wafer, device of evaluating metal contamination in boron-doped P-type silicon wafer, and method of manufacturing boron-doped P-type silicon wafer | Tsuyoshi Kubota | 2018-04-03 |