Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054859 | Real-time variable parameter micro-nano optical field modulation system and interference lithography system | Yan Ye, Guojun Wei, Yishen Xu, Donglin Pu, Linsen Chen | 2018-08-21 |