Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970788 | Scale measuring device, method for generating position information, and device with multi-axis stage | Shigeaki Maruyama, Masaaki Kusumi | 2018-05-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970788 | Scale measuring device, method for generating position information, and device with multi-axis stage | Shigeaki Maruyama, Masaaki Kusumi | 2018-05-15 |