Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9944532 | Solid source and method for the synthesis of silicon-containing precursors for chemical vapor deposition | Cetin Aktik | 2018-04-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9944532 | Solid source and method for the synthesis of silicon-containing precursors for chemical vapor deposition | Cetin Aktik | 2018-04-17 |