Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10097152 | MEMS component having AlN and Sc and method for manufacturing a MEMS component | Gilles Moulard, Paul Muralt | 2018-10-09 |
| 10079334 | BAW component and method for manufacturing a BAW component | Gilles Moulard, Paul Muralt, Thomas Metzger | 2018-09-18 |