Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147628 | Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus | Norio Shiraiwa | 2018-12-04 |
| 9887117 | Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus | Yoshifumi Katayama | 2018-02-06 |