Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161404 | Turbo-molecular pump | Tetsuya Tsubokawa | 2018-12-25 |
| 10024327 | Turbomolecular pump, and method of manufacturing rotor | — | 2018-07-17 |
| 9926792 | Turbo-molecular pump | — | 2018-03-27 |