MF

Masaaki Furuya

SM Shibaura Mechatronics: 1 patents #5 of 24Top 25%
Overall (2018): #321,796 of 503,207Top 65%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9922861 Substrate gripping device and substrate processing apparatus Koichi Higuchi 2018-03-20