Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083266 | Simulation method of CMP process | Yun Cao, Huan Kan, Fang Wei, Jun Zhu, Xusheng Zhang | 2018-09-25 |
| 9991116 | Method for forming high aspect ratio patterning structure | Peng Liu, Qiyan Feng, Yu Ren, Jun Zhu, HsuSheng Chang | 2018-06-05 |
| 9871064 | Method for forming shallow trenches of the dual active regions | Quan Jing, Jin Xu, Minjie Chen, Yu Ren, Jun Zhu +1 more | 2018-01-16 |