Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984856 | Ion implantation apparatus | Shiro Ninomiya, Yasuharu Okamoto, Yusuke Ueno | 2018-05-29 |
| 9905397 | Ion implantation apparatus and scanning waveform preparation method | Shiro Ninomiya | 2018-02-27 |