Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042269 | Apparatus and method for overlay measurement | Qiang Wu, Yang Liu | 2018-08-07 |
| 9992857 | Light source and photolithography apparatus containing the same, calibrating apparatus and method | Qiang Wu | 2018-06-05 |
| 9927601 | Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method | Qiang Wu | 2018-03-27 |