Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134784 | Peeling apparatus and manufacturing apparatus of semiconductor device | Shingo Eguchi, Atsuhiro Tani, Misako Hirosue, Kenichi Hashimoto, Yasuharu HOSAKA | 2018-11-20 |
| 9995970 | Manufacturing method of a liquid crystal device comprising an alignment film formed under reduced pressure | Hiroki Adachi, Shingo Eguchi, Saki Obana, Koji Moriya, Shuji Fukai | 2018-06-12 |