Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971143 | Interference filter and MEMS element having connected first and second grooves in a moveable substrate having non-uniform thickness | Teruyuki Nishimura | 2018-05-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9971143 | Interference filter and MEMS element having connected first and second grooves in a moveable substrate having non-uniform thickness | Teruyuki Nishimura | 2018-05-15 |