Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032654 | Substrate treatment apparatus | Sei NEGORO, Toyohide Hayashi, Koji Hashimoto, Yasuhiko Nagai | 2018-07-24 |
| 9991141 | Substrate processing apparatus and heater cleaning method | — | 2018-06-05 |