Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133173 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Hiroyuki Araki, Masanori Suzuki, Tomokatsu Sato, Nobuo Kawase | 2018-11-20 |
| 9997378 | Substrate processing apparatus and substrate processing method | Hirofumi MASUHARA, Kenichiro Arai, Toru Endo | 2018-06-12 |
| 9972515 | Substrate processing apparatus and substrate processing method | Kenichiro Arai | 2018-05-15 |