Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892955 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Akihiko TAKI | 2018-02-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892955 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Akihiko TAKI | 2018-02-13 |