Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121683 | Light-irradiation heat treatment method and heat treatment apparatus | Takayuki Aoyama, Masashi Furukawa, Shinichi Kato, Kazuhiko Fuse, Hideaki Tanimura | 2018-11-06 |
| 9966254 | Method and apparatus for heat-treating high dielectric constant film | — | 2018-05-08 |