Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103323 | Method for forming a hard mask pattern and method for manufacturing a semiconductor device using the same | Yong-Seok Chung, Yoonjong Song, Gwanhyeob Koh | 2018-10-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103323 | Method for forming a hard mask pattern and method for manufacturing a semiconductor device using the same | Yong-Seok Chung, Yoonjong Song, Gwanhyeob Koh | 2018-10-16 |