Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133176 | Hardmask composition and method of forming pattern using the same | Minsu SEOL, Sangwon Kim, Hyeonjin Shin, Seongjun Park | 2018-11-20 |
| 10134628 | Multilayer structure including diffusion barrier layer and device including the multilayer structure | Hyunjae Song, Seunggeol NAM, Seongjun Park, Keunwook Shin, Hyeonjin Shin +2 more | 2018-11-20 |