Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083840 | System and method for regenerating phosphoric acid solution, and apparatus and method for treating substrate | Seungho Lee, Minhee Cho, Ki-Moon Kang | 2018-09-25 |
| 9975151 | Apparatus and method for treating substrate | Oh Jin Kwon, Ki Hoon CHOI | 2018-05-22 |
| 9940531 | Apparatus and method for setting region of interest | Kyung Soo Kang, Keun Ho Kang | 2018-04-10 |