Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10041172 | Gas injection apparatus and thin film deposition equipment including the same | Ki-Chul Kim, Jung-Il Ahn, Jung-Hun Seo, Jong-Cheol Lee, Kyu-Hee Han +1 more | 2018-08-07 |