Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9995648 | Optical measurement system and method for measuring critical dimension of nanostructure | Alexey Andreevich Shchekin, Sergey Nikolaevich Koptyaev, Anton Sergeevich MEDVEDEV | 2018-06-12 |