Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892915 | Hard mask composition, carbon nanotube layer structure, pattern forming method, and manufacturing method of semiconductor device | Seung Yun Yang, Seung Hyun Lee, Yool Kang, Yi Seul Kim, Yun-Seok Choi | 2018-02-13 |