Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9951422 | Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors | Jaechul Shin, Geunkyu Choi, MinHwa Jung, Sukjin Chung | 2018-04-24 |