Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9927720 | Substrate target for in-situ lithography metrology, metrology method for in-situ lithography, and method of manufacturing integrated circuit device by using in-situ metrology | Ji-myung Kim, Tae-hwa Jeong, Kwang-Sub Yoon | 2018-03-27 |