Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054513 | Apparatus and method of sensing liquid leakage for lithography apparatus | Sung-Joo Kim, Jin-Pyoung Kim, Jae-Pil Lee, Hyun-Hoon Lee, Sung-Jo Hwang | 2018-08-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054513 | Apparatus and method of sensing liquid leakage for lithography apparatus | Sung-Joo Kim, Jin-Pyoung Kim, Jae-Pil Lee, Hyun-Hoon Lee, Sung-Jo Hwang | 2018-08-21 |