Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10137533 | Multi-functional apparatus for testing and etching substrate and substrate processing apparatus including the same | Sung Hwan Kim, Sang-Su Kim, Je-Hyun Song, Tae Hun Lee, Sung-Won Yang +1 more | 2018-11-27 |