Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126224 | Particle sensor and method for manufacturing a particle sensor | Achim Trautmann | 2018-11-13 |
| 10012828 | Assembly body for micromirror chips, mirror device and production method for a mirror device | Frank Schatz, Kerrin Doessel, Stefan Pinter, Daniel Pantel, Franziska Rohlfing | 2018-07-03 |