Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043884 | Manufacturing method for semiconductor device | — | 2018-08-07 |
| 9935023 | Methods for manufacturing semiconductor device and for detecting end point of dry etching | Kazuhide FUKAYA, Kentaro Yamada | 2018-04-03 |