Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090133 | Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation | Ashwini K. Sinha, Stanley M. Smith, Douglas C. Heiderman | 2018-10-02 |