Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9863036 | Wafer stage for symmetric wafer processing | Sarpangala Hariharakeshava Hegde, Peter R. Goglia | 2018-01-09 |
| 9865436 | Powered anode for ion source for DLC and reactive processes | Sarpangala Hariharakeshava Hegde | 2018-01-09 |