Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147585 | Plasma processing apparatus | Hiroshi Kawaura, Tetsuya Yukimoto | 2018-12-04 |
| 10141162 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Satoshi SUEMASU | 2018-11-27 |
| 10115565 | Plasma processing apparatus and plasma processing method | Ichiro Nakayama | 2018-10-30 |
| 9978593 | Plasma processing device, plasma processing method and manufacturing method of electronic device | — | 2018-05-22 |
| 9885115 | Plasma treatment apparatus and plasma treatment method | — | 2018-02-06 |