Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996916 | Evaluation method, storage medium, exposure apparatus, exposure method, and method of manufacturing article | Ryo Sasaki | 2018-06-12 |
| 9948867 | Apparatus, method, and computer-readable storage device for generating composite image | Yoshiyuki Fukuya, Kazuo KANDA, Nobuyuki Shima | 2018-04-17 |