Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157768 | Substrate processing apparatus, transfer method, and susceptor | Naohisa Ikeya, Kunihiko Suzuki | 2018-12-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157768 | Substrate processing apparatus, transfer method, and susceptor | Naohisa Ikeya, Kunihiko Suzuki | 2018-12-18 |