Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157723 | Multi charged particle beam writing apparatus and method of adjusting the same | Yukitaka Shimizu | 2018-12-18 |
| 10042261 | Method of aperture alignment and multi charged particle beam writing apparatus | — | 2018-08-07 |