Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134562 | Multi charged particle beam writing apparatus, and multi charged particle beam writing method | Yasuo Kato, Hideo Inoue, Hiroshi Matsumoto | 2018-11-20 |
| 9899187 | Charged particle beam writing apparatus and charged particle beam writing method | Yasuo Kato, Masafumi Ise | 2018-02-20 |