Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10041892 | Charged particle beam inspection apparatus and charged particle beam inspection method | Masataka Shiratsuchi, Chosaku Noda | 2018-08-07 |
| 10036714 | Image capturing device and inspection apparatus and inspection method | — | 2018-07-31 |
| 10007980 | Inspection method and inspection apparatus | Masatoshi Hirono | 2018-06-26 |