Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10127648 | Pattern inspection apparatus and pattern inspection method | Hideki Nukada | 2018-11-13 |
| 10094791 | Pattern inspection apparatus | — | 2018-10-09 |
| 10026011 | Mask inspection apparatus, mask evaluation method and mask evaluation system | Hideo Tsuchiya, Ikunao Isomura | 2018-07-17 |
| 9922415 | Inspection method, inspection apparatus, and inspection system | Takafumi Inoue, Hiroteru Akiyama | 2018-03-20 |
| 9869650 | Pattern inspection apparatus | — | 2018-01-16 |