HM

Hironobu Matsumoto

NT Nuflare Technology: 2 patents #10 of 62Top 20%
Overall (2018): #144,459 of 503,207Top 30%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10074516 Charged particle beam writing apparatus and charged particle beam writing method — 2018-09-11
9947509 Multiple charged particle beam lithography apparatus and multiple charged particle beam lithography method — 2018-04-17