Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115608 | Method and apparatus for rapid pump-down of a high-vacuum loadlock | Victor F. Morris, Ram Charan, Ronald A. Powell, Mukul Khosla | 2018-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115608 | Method and apparatus for rapid pump-down of a high-vacuum loadlock | Victor F. Morris, Ram Charan, Ronald A. Powell, Mukul Khosla | 2018-10-30 |