Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106140 | Spring brake chamber | Takeo Shimomura | 2018-10-23 |
| 10088745 | Pellicle for EUV exposure | Toru Shirasaki | 2018-10-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106140 | Spring brake chamber | Takeo Shimomura | 2018-10-23 |
| 10088745 | Pellicle for EUV exposure | Toru Shirasaki | 2018-10-02 |