Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10033290 | Power conversion device | Hironori Koyano, Masao Saito, Kouji Yamamoto, Tsutomu Matsukawa, Manabu Koshijo +2 more | 2018-07-24 |
| 9915938 | Adjustment apparatus for adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatus | Koichi Takeda | 2018-03-13 |