Issued Patents 2018
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9915878 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-03-13 |
| 9910361 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-03-06 |
| 9891531 | Exposure apparatus and exposure method, and device manufacturing method | — | 2018-02-13 |
| 9874823 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-01-23 |
| 9874822 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2018-01-23 |
| 9857701 | Exposure apparatus, exposure method, and device manufacturing method | — | 2018-01-02 |
| 9857697 | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | — | 2018-01-02 |