Issued Patents 2018
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162274 | Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method | — | 2018-12-25 |
| 10151979 | Exposure method, exposure apparatus, and device manufacturing method | — | 2018-12-11 |
| 10139736 | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium | — | 2018-11-27 |
| 10139738 | Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method | — | 2018-11-27 |
| 10139737 | Lithographic apparatus and method having substrate and sensor tables | — | 2018-11-27 |
| 10133194 | Movable body apparatus, exposure apparatus, and device manufacturing method | — | 2018-11-20 |
| 10133195 | Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method | — | 2018-11-20 |
| 10132658 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2018-11-20 |
| 10120288 | Stage device, exposure apparatus, and method of manufacturing devices | — | 2018-11-06 |
| 10101673 | Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method | — | 2018-10-16 |
| 10088759 | Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method | — | 2018-10-02 |
| 10088343 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2018-10-02 |
| 10073345 | Exposure method, exposure apparatus, and device manufacturing method | — | 2018-09-11 |
| 10073359 | Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method | — | 2018-09-11 |
| 10067428 | Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method | — | 2018-09-04 |
| 10048598 | Movable body apparatus, exposure apparatus, and device manufacturing method | — | 2018-08-14 |
| 10012913 | Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method | — | 2018-07-03 |
| 10007196 | Lithographic apparatus and method having substrate and sensor tables | — | 2018-06-26 |
| 9989859 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2018-06-05 |
| 9983486 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2018-05-29 |
| 9971246 | Exposure method, exposure apparatus, and device manufacturing method | — | 2018-05-15 |
| 9971253 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2018-05-15 |
| 9958792 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2018-05-01 |
| 9946171 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2018-04-17 |
| 9921490 | Substrate holding device, exposure apparatus, and device manufacturing method | — | 2018-03-20 |