YA

Yasuo Aoki

NI Nikon: 2 patents #46 of 309Top 15%
Overall (2018): #89,380 of 503,207Top 20%
2
Patents 2018

Issued Patents 2018

Patent #TitleCo-InventorsDate
9977345 Movable body apparatus, exposure apparatus and device manufacturing method — 2018-05-22
9921496 Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method — 2018-03-20