Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156795 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2018-12-18 |
| 10007190 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2018-06-26 |