Issued Patents 2018
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10133189 | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium | Kenyo ODANAKA | 2018-11-20 |
| 10095127 | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium | — | 2018-10-09 |
| 10082738 | Liquid immersion member, exposure apparatus, exposure method, and method of manufacturing device | — | 2018-09-25 |
| 10020282 | Method for manufacturing semiconductor device, heat insulating load jig, and method for setting up heat insulating load jig | Satoshi Tanimoto, Yusuke Zushi, Yoshinori Murakami, Kohei Matsui, Yu Fukushima | 2018-07-10 |
| 10007189 | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium | — | 2018-06-26 |
| 9981630 | Webbing take-up device | — | 2018-05-29 |
| 9927724 | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium | — | 2018-03-27 |
| 9916901 | Memory device including multiple gate-induced drain leakage current generator circuits | Masanobu Saito, Shuji Tanaka | 2018-03-13 |
| 9915882 | Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium | — | 2018-03-13 |
| 9910365 | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium | — | 2018-03-06 |
| 9904184 | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium | — | 2018-02-27 |
| 9857700 | Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium | — | 2018-01-02 |