Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10084364 | Power minimizing controller for a stage assembly | Neyram Hemati | 2018-09-25 |
| 10078269 | Array of encoders for alignment measurement | Eric Peter Goodwin, Ruslan Kurdyumov | 2018-09-18 |
| 9946163 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | — | 2018-04-17 |
| 9921495 | Magnetic sensor calibration and servo for planar motor stage | Pai-Hsueh Yang, J. Kyle Wells, Chetan Mahadeswaraswamy, Tsutomu Ogiwara | 2018-03-20 |
| 9874817 | Microelectromechanical mirror assembly | Shane R. Palmer | 2018-01-23 |