MS

Makoto Shibuta

NI Nikon: 2 patents #46 of 309Top 15%
📍 Gyōda, JP: #10 of 59 inventorsTop 20%
Overall (2018): #121,722 of 503,207Top 25%
2
Patents 2018

Issued Patents 2018

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9964860 Substrate holding apparatus, exposure apparatus, and device fabricating method 2018-05-08
9904182 Exposure apparatus 2018-02-27