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NI Nikon: 1 patents #100 of 309Top 35%
📍 Fukaya, JP: #6 of 8 inventorsTop 75%
Overall (2018): #410,173 of 503,207Top 85%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9865494 Substrate holding method, substrate holding apparatus, exposure apparatus and exposure method — 2018-01-09